PG/PBN Heater

The PG/PBN heater is an innovative heater made by laminating two advanced ceramics, Pyrolytic Boron Nitride (PBN) and Pyrolytic Graphite (PG), produced by the low-pressure thermal Chemical Vapor Deposition (CVD) method.
Achieves both high temperatures of 1600°C and rapid heating rates of up to 810°C/second*, which were impossible with conventional ceramic heaters. Furthermore, it demonstrates remarkable durability by passing 10000 heat cycle tests.Despite being thin, we can manufacture large sizes and cylindrical shapes. We accommodate all process requirements.

*When heated solely by a PG/PBN heater in a vacuum

Structure of PG/PBN Heaters

Cross section of PG/PBN heater

Features

●Heats up to 1600°C
By operating at temperatures up to 1600°C, it enables high-temperature processes that were impossible with conventional ceramic heaters.
●Ramp-up rate of 810°C/second
Achieves remarkable heating speed that dramatically shortens process time and significantly enhances productivity.
●Long Lifespan
Proven durability with 10000 thermal cycles (200-1200°C) , delivering superior thermal shock resistance that significantly reduces operating costs.
●Temperature Uniformity
Achieves excellent temperature uniformity of 900°C ±2.5°C on Φ8inch wafers. Multi-zone control enables high-precision temperature distribution control.
●Both PG and PBN are chemically stable
●High Purity
Each metal impurity is less than 1 ppm.
*Si is <5 ppm.
●Low Outgassing
Compatible with high-vacuum processes, and outgassing is minimal due to the absence of grain boundaries found in sintered materials.
●Thin Profile & Large Size Capability
Despite its thin design of 0.7-2mm thickness, it accommodates large sizes up to Φ380mm.By combining multiple heaters, we can also manufacture large heaters with Φ380mm or more. Cylindrical shapes of Φ160 × H400mm can also be manufactured.
●Special PG
By depositing our original special PG, we improve the adhesion of the overcoat layer and achieve flat temperature-resistivity characteristics.

Specifications

Maximum Operating Temperature (Proven)	1600°C (in a vacuum)*
Maximum Heating Rate (Proven)	810°C/sec (heater unit alone)*
Temperature Uniformity	900°C ±2.5°C on Φ8inch wafer*
Heat Cycle Durability	Over 10000 cycles (200°C⇔1200°C)*
Thickness	0.7-2mm
Maximum size	Φ380mm (Disk type) *Large heaters with Φ380mm or more require consultation. Φ160 x H400mm (Cylindrical type)
Purity	Each metallic impurity < 1 ppm (Si is < 5 ppm)
Operating Environment	High-vacuum compatible

*Not a guaranteed value.

Validation data

●PG/PBN Heater Ramp-Up Performance (Rate & Max. Temperature)

●PG/PBN Heater Heat Cycle Test (Heater size: Φ30×T1mm)

Result: No damage. No delamination.

●Wafer Heating Example Using PG/PBN Heaters

Applications

Substrate heaters for sputtering, CVD equipment in semiconductor manufacturing processes
Source material heaters for metal deposition processes
Sample heaters for electron microscopes and analytical instruments
Nozzle heaters for gas heating
Heaters for molds and dies
Cathode heaters, etc

FAQ

Q.

What information is required when requesting a quote for PG/PBN heaters?

Please provide the heater’s shape, dimensions of each part, quantity, power supply capacity(maximum voltage, maximum current), operating temperature, gas type, pressure, and application(to the extent you can disclose) .
Q.

What is the process for heater pattern design?

We generally handle the heater pattern design. We determine the heater resistance, pattern width, heating layer thickness, and pattern layout based on your power supply specifications and desired temperature. Conversely, sometimes we design the heater pattern first, and the customer selects a suitable power supply for the heater’s resistance and operating temperature.
Q.

What is the heater lifespan and do you provide a lifespan warranty?

The lifespan of PG/PBN heaters varies depending on the usage environment and cannot be generalized. Furthermore, we do not provide a lifespan guarantee.
Q.

How should I connect the PG/PBN heater to a power supply?

We can provide an instruction manual with notes on installing the PG/PBN heater and recommended power connection methods. Please let us know if you need it.
Q.

What kind of power supply should be used for the PG/PBN heater? And what about the control method?

We do not place restrictions on the power supply. Whether AC or DC, as long as the necessary power can be supplied, it can reach the desired temperature. There are no particular restrictions on the control method either.
Q.

Can you estimate the Voltage, Current, and Power required to heat a PG/PBN heater to a specific temperature?

It is possible to estimate the voltage, current, and power based on our PG/PBN heater test results. However, the voltage, current, and power required to heat a PG/PBN heater to a certain temperature will vary depending on your operating environment (equipment structure, insulation around the heater). The values may not be the same in your equipment. Therefore, these are reference values, not guaranteed values.
Q.

Are there any gas types to be cautious of?

Caution is required when using PG/PBN heaters in the presence of O₂, H₂, NH₃, and other gases that generate H₂ through thermal decomposition, as well as fluorine-based gases. The recommended operating temperatures are 400°C or below in atmospheric air or O₂ environments, and 800°C or below in the presence of H₂, NH₃, and other hydrogen-generating gases. When operated above these recommended temperatures, malfunctions are expected to occur primarily at terminal connections. However, service life prediction is difficult as it is also affected by gas concentration and pressure. PBN is corroded by F₂ gas at temperatures as low as 100°C. Do not use fluorine-based gases. Technical documentation detailing gases requiring special precautions is available upon request. Please contact us.
Q.

Can you provide a heater assembly that combines the PG/PBN heater with support plates, reflectors, thermocouples, etc.?

We do not provide heater assemblies. We only provide the PG/PBN heater unit itself and the included carbon washers.
Q.

How can I attach a thermocouple to the PG/PBN heater?

PG/PBN heaters can be equipped with through holes, blind holes, grooves, and other features for attaching thermocouples.We can also provide technical documentation with examples of thermocouple mounting methods. Please let us know if you need it.
Q.

What is the emissivity of the PG/PBN heater?

The total emissivity at 250°C in the wavelength range of 2-100 μm is 0.76. We can also provide technical documentation detailing the emission energy distribution. Please let us know if you need it.
Q.

What enables the achievement of such high temperatures as 1600°C?

This is achieved through the excellent material properties of PG (Pyrolytic Graphite) and PBN (Pyrolytic Boron Nitride) and a dense laminated structure created by the CVD method. PG has heat resistance of over 2000°C, and PBN provides excellent insulation and chemical stability. This combination achieves high temperatures that were impossible with conventional ceramic heaters.
Q.

Why is the ramp-up speed so fast?

This is achieved by its thin design (0.7〜2mm), the thermal conductivity of PG, and the thermal shock resistance and low thermal capacity of both PBN and PG. Additionally, its dense laminated structure results in extremely high thermal efficiency, converting input power to heat effectively. This has achieved an astonishing ramp-up speed of 810°C/sec.
Q.

Can it really withstand 10000 heat cycles?

Yes, this has been demonstrated. The thermal expansion coefficients of PBN and PG are similar, minimizing thermal stress at the laminated interface. Furthermore, the CVD method creates a dense structure without grain boundaries, making it resistant to cracks and delamination from thermal shock and ensuring stable performance over a long period.
Q.

Is it customizable?

Yes, we can customize the shape, size, zone division, electrode placement, etc., to match your process requirements. We support disk, cylindrical, and special shapes. It is also possible to adjust electrical properties by using special PG.