PBN Coated graphite Materials

PBN can be coated onto the surface of graphite. Graphite coated with PBN can be used for various applications such as heaters, susceptors, and reflectors. Furthermore, in high-temperature processes under an NH3 atmosphere, like in MOCVD equipment, coating with PBN can be effective in preventing graphite corrosion.
Shin-Etsu Chemical handles the entire process, from selecting and procuring the optimal graphite substrate for PBN to manufacturing. We also support large-sized products.
*We do not offer toll coating services

PBN Coated graphite Heaters

By selecting graphite substrates compatible with PBN, we can prevent PBN film delamination and expect extended lifespan.We can also manufacture large products up to Φ700mm.

Validation Data

NH3 Resistance Test Results

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It maintains excellent resistance up to 1400°C with no weight change.

Standard PBN Coating / Shin-Etsu Special coating

Black coating is also available using Shin-Etsu Special coating <See Crucible for molecular beam epitaxy (MBE) equipment> technology to enhance radiant heat absorption.

PBN Coated graphite Parts

In addition to heaters, it can be used for components such as susceptors and reflectors. Since PBN films are difficult to make thick, we will recommend PBN coated graphite parts for applications requiring PBN parts with a thickness of 5mm or more.

FAQ

Q.

What is the thickness of the PBN coat?

The thickness ranges from approximately 20 to 400 μm. Since coating has difficulty adhering to gaps, we recommend an opening length-to-depth ratio of 1:1.Additionally, corners will be rounded with a radius.
Considering thermal expansion, we use our specified graphite substrates (manufacturer undisclosed). Please specify either standard grade or high-purity grade graphite substrates.
Q.

Can PBN coating be applied to materials other than graphite?

PBN coating is not available on materials other than graphite.
Q.

Do you offer PBN coating services?

Due to the risk of contaminating our manufacturing equipment, this is generally not possible.