PBN is a machinable ceramic that can be processed and formed into any desired shape. Leveraging its properties of high heat resistance, high insulation, and high corrosion resistance, it serves as fixtures in various equipment.
Shin-Etsu Chemical’s PBN Machined Parts are characterized by high machining precision. We also handle products for specialized applications and unique thin film-like products.
It has higher purity than sintered boron nitride and does not produce outgassing. As it contains no Si source, it is ideal for applications where Si contamination must be avoided.
Our PBN machined parts are highly regarded for their resistance to delamination.
We also offer pyrolytic graphite (PG) coating and Shin-Etsu Special coating.
<See Crucible for Molecular Beam Epitaxy (MBE) Equipment>
Φ600mm, T5 mm
*Larger sizes require consultation.
Despite being a ceramic, this is a flexible and lightweight sheet. You can easily achieve insulation simply by inserting it where you want to prevent electrical conduction. It demonstrates excellent insulation performance even at high temperatures and under ultra-high temperature vacuum conditions.
Shin-Etsu Chemical also offers a uniquely developed thin-film product (less than 100μm thick). Since it can be freely cut with scissors, you can process it into a shape that suits your application.
T200μm
・W250×L1000 mm
・W40×L5000 mm
*Larger sizes require consultation.
*For other shapes, please inquire.
Due to its high purity, PBN can also be used as a raw material for various other BN materials.
We can produce discs up to Φ600mm with thickness up to approximately 5mm. If you have specific shapes or drawings, please contact us through our inquiry form.
Dimensional accuracy varies depending on the product’s shape. For specific shapes or if you have technical drawings, please contact us through our inquiry form.
Frequently Asked Questions
Frequently Asked Questions
PBN Crucible
Applications
Compound Semiconductor Crystal Growth
Molecular Beam Epitaxy (MBE) equipment
Electron Beam (EB) evaporation
Metal melting
PBN Machined Parts/
PBN Sheets/
Ultra-High Purity BN Raw Materials
Applications
High-Vacuum Insulation Components,Heater Support,High Purity Boron Nitride (BN) material
PBN Coated graphite Materials
Applications
Corrosion-resistant coating for graphite components (graphite heaters, susceptors, etc.)
PG/PBN Heater
Applications
CVD equipment, Sputtering Equipment
Pyrolytic Boron Nitride
Electrostatic Chuck
Applications
High-temperature Sputtering Equipment,Ion Implantation Equipment
Contact us for consultation, quotes and documents.
Please contact us via the inquiry form with details about your needs.
We will provide proposals tailored to your requirements.