FAQ

Please refer to the “What is PBN?” page for typical metal concentrations. Please note that these are not guaranteed values.

It depends on your operating environment, so we cannot provide a definite answer. We also do not provide product lifetime warranties.

We can accommodate crucibles up to a maximum diameter of Φ400mm and a height of approximately 560mm. For specific shapes or if you have technical drawings, please contact us through our inquiry form.

We can produce discs up to Φ600mm with thickness up to approximately 5mm. If you have specific shapes or drawings, please contact us through our inquiry form.

Dimensional accuracy varies depending on the product’s shape. For specific shapes or if you have technical drawings, please contact us through our inquiry form.

The thickness ranges from approximately 20 to 400 μm. Since coating has difficulty adhering to gaps, we recommend an opening length-to-depth ratio of 1:1.Additionally, corners will be rounded with a radius.
Considering thermal expansion, we use our specified graphite substrates (manufacturer undisclosed). Please specify either standard grade or high-purity grade graphite substrates.

PBN coating is not available on materials other than graphite.

Due to the risk of contaminating our manufacturing equipment, this is generally not possible.

Please provide the heater’s shape, dimensions of each part, quantity, power supply capacity(maximum voltage, maximum current), operating temperature, gas type, pressure, and application(to the extent you can disclose) .

We generally handle the heater pattern design. We determine the heater resistance, pattern width, heating layer thickness, and pattern layout based on your power supply specifications and desired temperature. Conversely, sometimes we design the heater pattern first, and the customer selects a suitable power supply for the heater’s resistance and operating temperature.

The lifespan of PG/PBN heaters varies depending on the usage environment and cannot be generalized. Furthermore, we do not provide a lifespan guarantee.

We can provide an instruction manual with notes on installing the PG/PBN heater and recommended power connection methods. Please let us know if you need it.

We do not place restrictions on the power supply. Whether AC or DC, as long as the necessary power can be supplied, it can reach the desired temperature. There are no particular restrictions on the control method either.

It is possible to estimate the voltage, current, and power based on our PG/PBN heater test results. However, the voltage, current, and power required to heat a PG/PBN heater to a certain temperature will vary depending on your operating environment (equipment structure, insulation around the heater). The values may not be the same in your equipment. Therefore, these are reference values, not guaranteed values.

Caution is required when using PG/PBN heaters in the presence of O₂, H₂, NH₃, and other gases that generate H₂ through thermal decomposition, as well as fluorine-based gases. The recommended operating temperatures are 400°C or below in atmospheric air or O₂ environments, and 800°C or below in the presence of H₂, NH₃, and other hydrogen-generating gases. When operated above these recommended temperatures, malfunctions are expected to occur primarily at terminal connections. However, service life prediction is difficult as it is also affected by gas concentration and pressure. PBN is corroded by F₂ gas at temperatures as low as 100°C. Do not use fluorine-based gases. Technical documentation detailing gases requiring special precautions is available upon request. Please contact us.

We do not provide heater assemblies. We only provide the PG/PBN heater unit itself and the included carbon washers.

PG/PBN heaters can be equipped with through holes, blind holes, grooves, and other features for attaching thermocouples.We can also provide technical documentation with examples of thermocouple mounting methods. Please let us know if you need it.

The total emissivity at 250°C in the wavelength range of 2-100 μm is 0.76. We can also provide technical documentation detailing the emission energy distribution. Please let us know if you need it.

This is achieved through the excellent material properties of PG (Pyrolytic Graphite) and PBN (Pyrolytic Boron Nitride) and a dense laminated structure created by the CVD method. PG has heat resistance of over 2000°C, and PBN provides excellent insulation and chemical stability. This combination achieves high temperatures that were impossible with conventional ceramic heaters.

This is achieved by its thin design (0.7〜2mm), the thermal conductivity of PG, and the thermal shock resistance and low thermal capacity of both PBN and PG. Additionally, its dense laminated structure results in extremely high thermal efficiency, converting input power to heat effectively. This has achieved an astonishing ramp-up speed of 810°C/sec.

Yes, this has been demonstrated. The thermal expansion coefficients of PBN and PG are similar, minimizing thermal stress at the laminated interface. Furthermore, the CVD method creates a dense structure without grain boundaries, making it resistant to cracks and delamination from thermal shock and ensuring stable performance over a long period.

Yes, we can customize the shape, size, zone division, electrode placement, etc., to match your process requirements. We support disk, cylindrical, and special shapes. It is also possible to adjust electrical properties by using special PG.

It is typically <0.1mm. If lower flatness is required, please consult with us.

Multiple zones are supported. Since it depends on the product shape, please consult with us.

We design according to customer specifications, below 300V and below 20A.

It is typically ±0.5kV at 500°C. If you require higher insulation performance, please consult with us.

The proven maximum operating temperature is 800°C.

It cannot be used in a fluorine plasma atmosphere. Please consult with us about other operating environments.

As it depends on the customer’s operating environment, there is no specific warranty period.

We can produce thicknesses from 12mm to 25mm.

We can support up to Φ12inch.

PBN has high purity and excellent thermal conductivity, electrical insulation, and chemical stability. It is particularly stable in high-temperature environments and can be used over a wide temperature range up to 800°C.

Yes, it is. We provide products optimized to your process requirements, including wafer size, electrode patterns, and heater design.