Pyrolytic Boron Nitride (PBN)
Properties of PBN
This high-performance ceramics material combines excellent heat resistance and insulation properties.
PBN (Pyrolytic Boron Nitride) is a high-purity boron nitride manufactured by chemical vapor deposition (CVD) at high temperatures of approximately 2000°C. Compared to conventional sintered BN, it exhibits superior chemical stability and excellent heat resistance, thermal shock resistance, thermal conductivity, acid resistance, and electrical insulation properties.
PBN has a hexagonal crystal structure very similar to graphite. As shown in the image, it shows different physical properties: high thermal conductivity in the a-direction (in-plane direction) and excellent thermal insulation in the c-direction (through-thickness direction).
Thermal Conductivity
Resistivity
| Elements | Content (ppm) |
|---|---|
| Na | ＜0.3 |
| AI | ＜1.0 |
| Ca | ＜0.3 |
| Mn | ＜0.2 |
| Fe | ＜0.3 |
| Co | ＜0.3 |
| Ni | ＜0.3 |
| Cu | ＜0.1 |
| Zn | ＜0.5 |
| Mg | ＜0.3 |
Our standard PBN is Low Density. We can also manufacture High Density variants.
| Properties | Low Density | High Density |
|---|---|---|
| Density (g/cc) | 1.99 | 2.15 |
| Flexural Strength (MPa) | 150 | 230 |
| Elastic Modulus (GPa) | 16 | 16 |
| Compressive Strength (MPa) | 330 | 330 |
| Hardness (HV10) | 110 | 110 |
| Maximum Service Temperature (Inert) (°C) | 2400 | 2400 |
| Thermal Conductivity a-direction (W/m･K) | 50-60 | 110 |
| c-direction (W/m･K) | 1.8 | |
| Coefficient of Thermal Expansion a-direction (1/°C) | 3.5 ✕ 10 -6 | 2.8 ✕ 10 -6 |
| c-direction (1/°C) | 32 ✕ 10 -6 | 32 ✕ 10 -6 |
| Specific Heat (J/kg･K) | 800 | 787 |
| Dielectric Breakdown Strength a-direction (ac-kV/mm) | ＞400 | ＞400 |
| Dielectric Constant @ 8.8 GHz | 4.2 | 4.9 |
| Dielectric Loss Tangent @ 8.8 GHz | ＜1.0 ✕ 10 -4 | ＜1.0 ✕ 10 -4 |
| Volume Resistivity (Ω・cm) | ＞10 14 | ＞10 14 |
| Poisson's Ratio a-direction (Room Temp) | 0.25 | |
| Tensile Strength a-direction (MPa) | 41 |
PBN Crucible
Applications
Compound Semiconductor Crystal Growth
Molecular Beam Epitaxy (MBE) equipment
Electron Beam (EB) evaporation
Metal melting
PBN Machined Parts/
PBN Sheets/
Ultra-High Purity BN Raw Materials
Applications
High-Vacuum Insulation Components,Heater Support,High Purity Boron Nitride (BN) material
PBN Coated graphite Materials
Applications
Corrosion-resistant coating for graphite components (graphite heaters, susceptors, etc.)
PG/PBN Heater
Applications
CVD equipment, Sputtering Equipment
Pyrolytic Boron Nitride
Electrostatic Chuck
Applications
High-temperature Sputtering Equipment,Ion Implantation Equipment
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